Scanning electron beam induced deposition for conductive tip modification

P. L. Chen, James Su, M. H. Shiao, M. N. Chang, C.-H. Lee, C. W. Liu. Scanning electron beam induced deposition for conductive tip modification. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 553-556, IEEE, 2012. [doi]

Abstract

Abstract is missing.