A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers

Dongliang Chen, Liang Yin, Qiang Fu, Wenbo Zhang, Yihang Wang, Guorui Zhang, Yufeng Zhang, Xiaowei Liu. A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers. Sensors, 20(1):91, 2020. [doi]

Abstract

Abstract is missing.