M. C. Cheng, L. K. Chen, C.-K. Sung. Fabrication of controllable profile microlens array by nanoimprinting process. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 542-546, IEEE, 2012. [doi]
Abstract is missing.