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Fabrication of controllable profile microlens array by nanoimprinting process

M. C. Cheng, L. K. Chen, C.-K. Sung. Fabrication of controllable profile microlens array by nanoimprinting process. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 542-546, IEEE, 2012. [doi]

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M. C. Cheng

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L. K. Chen

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C.-K. Sung

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