Method for Evaluating Reliance Level of a Virtual Metrology System

Fan-Tien Cheng, Yeh-Tung Chen, Yu-Chuan Su, Deng-Lin Zeng. Method for Evaluating Reliance Level of a Virtual Metrology System. In 2007 IEEE International Conference on Robotics and Automation, ICRA 2007, 10-14 April 2007, Roma, Italy. pages 1590-1596, IEEE, 2007. [doi]

Abstract

Abstract is missing.