Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?

Thomas Chiarella, Liesbeth Witters, Abdelkarim Mercha, C. Kerner, R. Dittrich, Michal Rakowski, C. Ortolland, L.-Å. Ragnarsson, Bertrand Parvais, A. De Keersgieter, S. Kubicek, A. Redolfi, R. Rooyackers, C. Vrancken, S. Brus, A. Lauwers, Philippe Absil, S. Biesemans, Thomas K. Hoffmann. Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?. In 35th European Solid-State Circuits Conference, ESSCIRC 2009, Athens, Greece, 14-18 September 2009. pages 84-87, IEEE, 2009. [doi]

Abstract

Abstract is missing.