Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films

A-Ram Choi, Sang-Sik Choi, Byung-Guan Park, Dongwoo Suh, Gyungock Kim, Jin Tae Kim, Jin Soo Choi, Deok Ho Cho, Tae-Hyun Han, Kyu-Hwan Shim. Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films. IEICE Transactions, 91-C(5):767-771, 2008. [doi]

Abstract

Abstract is missing.