Zhaozhi Chu, Chunrong Peng, Fengjie Zheng, Shanhong Xia. An electric field microsensor with metal-silicon structure. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 562-565, IEEE, 2017. [doi]
Abstract is missing.