Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Sheng-Luen Chung, MuDer Jeng. Fabulous MESs and C/Cs: an overview of semiconductor fab automation systems. IEEE Robot. Automat. Mag., 11(1):8-18, 2004. [doi]
Abstract is missing.