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Fabrication and simulation of PDMS assisted CO2 laser ablation

C. K. Chung, S. L. Lin, K. C. Chang, H.-Y. Wang. Fabrication and simulation of PDMS assisted CO2 laser ablation. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 650-653, IEEE, 2010. [doi]

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