Design and Optimization of a Capacitive Micromachined Ultrasonic Transducer Micro-Array for Near Field Sensing

Clyde Clarke, Carl White, Ralph Etienne-Cummings. Design and Optimization of a Capacitive Micromachined Ultrasonic Transducer Micro-Array for Near Field Sensing. In International Symposium on Circuits and Systems (ISCAS 2007), 27-20 May 2007, New Orleans, Louisiana, USA. pages 81-84, IEEE, 2007. [doi]

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