Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films

Marquis Crose, Weiqi Zhang, Anh Tran, Panagiotis D. Christofides. Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films. Computers & Chemical Engineering, 113:184-195, 2018. [doi]

Abstract

Abstract is missing.