Distribution and generation of traps in SiO::2::/Al::2::O::3:: gate stacks

Isodiana Crupi, Robin Degraeve, Bogdan Govoreanu, David P. Brunco, Philippe Roussel, Jan Van Houdt. Distribution and generation of traps in SiO::2::/Al::2::O::3:: gate stacks. Microelectronics Reliability, 47(4-5):525-527, 2007. [doi]

Abstract

Abstract is missing.