A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings

Jian Cui, Qiancheng Zhao. A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings. IEEE Transactions on Industrial Electronics, 69(11):11765-11773, 2022. [doi]

Abstract

Abstract is missing.