Turbomolecular high-vacuum pump bearings diagnostics using temperature and vibration measurements

Alessandro Paolo Daga, Luigi Garibaldi, Luca Bonmassar. Turbomolecular high-vacuum pump bearings diagnostics using temperature and vibration measurements. In IEEE International Workshop on Metrology for Industry 4.0 & IoT, MetroInd4.0&IoT 2021, Rome, Italy, June 7-9, 2021. pages 264-269, IEEE, 2021. [doi]

Abstract

Abstract is missing.