Capacitively Coupled Non-Contact Probing Circuits for Membrane-Based Wafer-Level Simultaneous Testing

Mutsuo Daito, Yoshiro Nakata, Satoshi Sasaki, Hiroyuki Gomyo, Hideki Kusamitsu, Yoshio Komoto, Kunihiko Iizuka, Katsuyuki Ikeuchi, Gil-Su Kim, Makoto Takamiya, Takayasu Sakurai. Capacitively Coupled Non-Contact Probing Circuits for Membrane-Based Wafer-Level Simultaneous Testing. J. Solid-State Circuits, 46(10):2386-2395, 2011. [doi]

Abstract

Abstract is missing.