Ram Dantu, Nikitas J. Dimopoulos, R. V. Patel, Asim J. Al-Khalili. A micro-manipulator vision in IC Manufacturing. In Proceedings of the 1988 IEEE International Conference on Robotics and Automation, Philadelphia, Pennsylvania, USA, April 24-29, 1988. pages 1455-1460, IEEE, 1988. [doi]
Abstract is missing.