Design of a 2-axis MEMS accelerometer

Jean Marie Darmanin, Ivan Grech, Edward Gatt, Owen Casha. Design of a 2-axis MEMS accelerometer. In 18th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2011, Beirut, Lebanon, December 11-14, 2011. pages 268-271, IEEE, 2011. [doi]

Abstract

Abstract is missing.