µ:::3:::: Multiscale, Deterministic Micro-Nano Assembly System for Construction of On-Wafer Microrobots

Aditya N. Das, Ping Zhang, Woo Ho Lee, Dan O. Popa, Harry E. Stephanou. µ:::3:::: Multiscale, Deterministic Micro-Nano Assembly System for Construction of On-Wafer Microrobots. In 2007 IEEE International Conference on Robotics and Automation, ICRA 2007, 10-14 April 2007, Roma, Italy. pages 461-466, IEEE, 2007. [doi]

Abstract

Abstract is missing.