Potential remedies for the V::T::/V::fb::-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey

W. Deweerd, V. Kaushik, J. Chen, Y. Shimamoto, T. Schram, L.-Å. Ragnarsson, A. Delabie, L. Pantisano, B. Eyckens, J. W. Maes. Potential remedies for the V::T::/V::fb::-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey. Microelectronics Reliability, 45(5-6):786-789, 2005. [doi]

No reviews for this publication, yet.