Zohir Dibi, Ali Boukabache, Patrick Pons. Effect of the silicon membrane flatness defect on the piezoresistive pressure sensor response. In Proceedings of the 2000 7th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2000, Jounieh, Lebanon, December 17-20, 2000. pages 853-856, IEEE, 2000. [doi]
Abstract is missing.