Fei Ding, Wenxuan Yu, Tingting Yu, Chao Ni, Ruyan Tang, Wengang Wu. A novel integrated micro-scale closed synthetic-jet-like flow field as gas lubrication in MEMS devices. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 567-571, IEEE, 2009. [doi]
Abstract is missing.