Measurement and Analysis of Parasitic Capacitance in FinFETs with High-k Dielectrics and Metal-Gate Stack

Abhisek Dixit, Anirban Bandhyopadhyay, Nadine Collaert, Kristin De Meyer, Malgorzata Jurczak. Measurement and Analysis of Parasitic Capacitance in FinFETs with High-k Dielectrics and Metal-Gate Stack. In VLSI Design 2009: Improving Productivity through Higher Abstraction, The 22nd International Conference on VLSI Design, New Delhi, India, 5-9 January 2009. pages 253-258, IEEE, 2009. [doi]

Abstract

Abstract is missing.