Nanometer-Scale Height Measurements in Micromachined Picoliter Vials Based on Interference Fringe Analysis

L. R. Van den Doel, Lucas J. van Vliet, K. T. Hjelt, M. J. Vellekoop, Ian T. Young, F. Gromball, Jan G. Korvink. Nanometer-Scale Height Measurements in Micromachined Picoliter Vials Based on Interference Fringe Analysis. In ICPR. pages 3057-3062, 2000. [doi]

Abstract

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