Calibration of MEMS accelerometer based on plane optical tracking technique and measurements

Zhuxin Dong, Uchechukwu C. Wejinya, Wen J. Li. Calibration of MEMS accelerometer based on plane optical tracking technique and measurements. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 893-897, IEEE, 2009. [doi]

Abstract

Abstract is missing.