Sidan Du, Lian Cai, Duntang Gao. Theoretical Calculation of TAM and Correction of Topography. In 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada. pages 548-552, IEEE Computer Society, 2004. [doi]
Abstract is missing.