Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams

Xiaohui Du, Yifang Liu, Anlin Li, Zhou Zhou, Daoheng Sun, Lingyun Wang. Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams. Sensors, 16(2):158, 2016. [doi]

Abstract

Abstract is missing.