Micro solid state silicon plate wind velocity sensor

Lidong Du, Zhan Zhao, Cheng Pang, Zhen Fang, Yonghong Liu, Youjun Han. Micro solid state silicon plate wind velocity sensor. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 1-4, IEEE, 2009. [doi]

Abstract

Abstract is missing.