Backside interferometric methods for localization of ESD-induced leakage current and metal shorts

V. Dubec, Scrgey Bychikhin, Dionyz Pogany, Erich Gornik, Tilo Brodbeck, Wolfgang Stadler. Backside interferometric methods for localization of ESD-induced leakage current and metal shorts. Microelectronics Reliability, 47(9-11):1539-1544, 2007. [doi]

Abstract

Abstract is missing.