Neda Emami, Maher Bakri-Kassem. Slotted multi-step RF MEMS-CMOS parallel plate variable capacitor. In IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016, Abu Dhabi, United Arab Emirates, October 16-19, 2016. pages 1-4, IEEE, 2016. [doi]
@inproceedings{EmamiB16-0,
title = {Slotted multi-step RF MEMS-CMOS parallel plate variable capacitor},
author = {Neda Emami and Maher Bakri-Kassem},
year = {2016},
doi = {10.1109/MWSCAS.2016.7869990},
url = {https://doi.org/10.1109/MWSCAS.2016.7869990},
researchr = {https://researchr.org/publication/EmamiB16-0},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016, Abu Dhabi, United Arab Emirates, October 16-19, 2016},
publisher = {IEEE},
isbn = {978-1-5090-0916-9},
}