Slotted multi-step RF MEMS-CMOS parallel plate variable capacitor

Neda Emami, Maher Bakri-Kassem. Slotted multi-step RF MEMS-CMOS parallel plate variable capacitor. In IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016, Abu Dhabi, United Arab Emirates, October 16-19, 2016. pages 1-4, IEEE, 2016. [doi]