Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes

Aniello Esposito, Mauro Ciappa, Wolfgang Fichtner. Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes. Microelectronics Reliability, 51(9-11):1673-1678, 2011. [doi]

Abstract

Abstract is missing.