Charging of radiation induced defects in RF MEMS dielectric films

M. Exarchos, E. Papandreou, P. Pons, M. Lamhamdi, G. J. Papaioannou, R. Plana. Charging of radiation induced defects in RF MEMS dielectric films. Microelectronics Reliability, 46(9-11):1695-1699, 2006. [doi]

Abstract

Abstract is missing.