Parameter characterization of anodic bonded electrical interconnect in MEMS/NEMS devices

Xuejiao Fan, Dacheng Zhang. Parameter characterization of anodic bonded electrical interconnect in MEMS/NEMS devices. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 198-201, IEEE, 2009. [doi]

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