Shao-Yun Fang, Kuo-Hao Wu. Guiding Template-Induced Design Challenges in DSA-MP Lithography. In 2018 IEEE Computer Society Annual Symposium on VLSI, ISVLSI 2018, Hong Kong, China, July 8-11, 2018. pages 500-502, IEEE Computer Society, 2018. [doi]
Abstract is missing.