Xudong Fang, Chen Wu, Xin Guo, Libo Zhao, Yulong Zhao, Zhuangde Jiang. Development of a 4H-SiC Piezoresistive Pressure Sensor for High Temperature Applications. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 105-109, IEEE, 2019. [doi]
Abstract is missing.