Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator

JingJing Feng, Cheng Liu, Wei Zhang, Jianxin Han, Shuying Hao. Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator. Sensors, 19(6):1348, 2019. [doi]

Abstract

Abstract is missing.