Claire Fenouillet-Béranger, S. Beaurepaire, Fabien Deprat, Alexandre Ayres De Sousa, Laurent Brunet, Perrine Batude, Olivier Rozeau, François Andrieu, Paul Besombes, M.-P. Samson, Bernard Previtali, F. Nemouchi, G. Rodriguez, P. Rodriguez, R. Famulok, Nils Rambal, V. Balan, Z. Saghi, V. Jousseaume, Charles-Antoine Guérin, F. Ibars, F. Proud, D. Nouguier, D. Ney, V. Delaye, H. Dansas, X. Federspiel, Maud Vinet. Guidelines for intermediate back end of line (BEOL) for 3D sequential integration. In 47th European Solid-State Device Research Conference, ESSDERC 2017, Leuven, Belgium, September 11-14, 2017. pages 252-255, IEEE, 2017. [doi]
Abstract is missing.