Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays

Andrew J. Flewitt, William I. Milne. Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays. Proceedings of the IEEE, 93(7):1364-1373, 2005. [doi]

Abstract

Abstract is missing.