Gilberto Flores, Gema A. Mercado, John A. Pelesko. Dynamics and Touchdown in Electrostatic MEMS. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 182-187, IEEE Computer Society, 2003. [doi]
Abstract is missing.