Complete Si-photonics device-library on 300mm wafers

D. Fowler, Charles Baudot, Jean-Marc Fedeli, B. Caire, L. Virot, A. Leliepvre, G. Grand, A. Myko, Delphine Marris-Morini, S. Messaoudene, A. Souhaite, S. Olivier, P. Grosse, Guang-Hua Duan, B. Ben Bakir, F. Boeuf, Laurent Vivien, Sylvie Menezo. Complete Si-photonics device-library on 300mm wafers. In Optical Fiber Communications Conference and Exhibition, OFC 2014, San Francisco, CA, USA, March 9-13, 2014. pages 1-3, IEEE, 2014. [doi]

Abstract

Abstract is missing.