Impact of spacer interface charges on performance and reliability of low temperature transistors for 3D sequential integration

T. Mota Frutuoso, J. Lugo-Alvarez, Xavier Garros, Laurent Brunet, Joris Lacord, L. Gerrer, Mikaël Casse, E. Catapano, Claire Fenouillet-Béranger, François Andrieu, F. Gaillard, Philippe Ferrari. Impact of spacer interface charges on performance and reliability of low temperature transistors for 3D sequential integration. In IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021. pages 1-5, IEEE, 2021. [doi]

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