Ultra-low-power and high frequency-response carbon nanotube based MEMS thermal sensors

Carmen Kar Man Fung, Wen J. Li. Ultra-low-power and high frequency-response carbon nanotube based MEMS thermal sensors. In 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems, Las Vegas, Nevada, USA, October 27 - November 1, 2003. pages 2371-2376, IEEE, 2003. [doi]

Abstract

Abstract is missing.