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50-kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√Hz ARW and 0.5°/h stability

Marco Gadola, F. Maspero, Giacomo Langfelder, M. Sansa, T. Verdot, A. Berthelot, P. Robert. 50-kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√Hz ARW and 0.5°/h stability. In 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020. pages 1-4, IEEE, 2020. [doi]

Authors

Marco Gadola

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F. Maspero

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Giacomo Langfelder

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M. Sansa

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T. Verdot

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A. Berthelot

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P. Robert

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