An absolute angle recovery method for dual-interferometer-based rotational stages

Pablo Serrano Galvez, Mark Butcher, Alessandro Masi. An absolute angle recovery method for dual-interferometer-based rotational stages. In IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2017, Torino, Italy, May 22-25, 2017. pages 1-6, IEEE, 2017. [doi]

Abstract

Abstract is missing.