Wei-Hsin Gau, Shin-Chun Huang, Yuh-Chung Hu. Fabrication and vibration analysis of micro-cross beams. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 211-214, IEEE, 2009. [doi]
Abstract is missing.