Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers

Khashayar Babaei Gavan, Joost van der Heijden, Emile W. J. M. van der Drift, Herre S. J. van der Zant. Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 380-384, IEEE, 2009. [doi]

Abstract

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