Tobias Gentner, Johannes Breitenbach, Timon Neitzel, Jacob Schulze, Ricardo Buettner. A Systematic Literature Review of Machine Learning Applications for Process Monitoring and Control in Semiconductor Manufacturing. In Hong Va Leong, Sahra Sedigh Sarvestani, Yuuichi Teranishi, Alfredo Cuzzocrea, Hiroki Kashiwazaki, Dave Towey, Ji-Jiang Yang, Hossain Shahriar, editors, 46th IEEE Annual Computers, Software, and Applications Conferenc, COMPSAC 2022, Los Alamitos, CA, USA, June 27 - July 1, 2022. pages 1081-1086, IEEE, 2022. [doi]
Abstract is missing.