Martin D. Giles, Duane S. Boning, Goodwin R. Chin, Walter C. Dietrich Jr., Michael S. Karasick, Mark E. Law, Purnendu K. Mozumder, Lee R. Nackman, V. T. Rajan, Duncan M. Hank Walker, Robert H. Wang, Alexander S. Wong. Semiconductor wafer representation for TCAD. IEEE Trans. on CAD of Integrated Circuits and Systems, 13(1):82-95, 1994. [doi]
Abstract is missing.