A concentrated springs architecture for single-digit frequency symmetry in Si MEMS gyroscope

J. Giner, Y. Zhang, T. Shiota, D. Maeda, K. Ono, Shinya Kajiyama, T. Oshima, Taizo Yamawaki, T. Sekiguchi. A concentrated springs architecture for single-digit frequency symmetry in Si MEMS gyroscope. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

Abstract

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